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. 2018 Apr 24;9(5):198. doi: 10.3390/mi9050198

Figure 6.

Figure 6

Capacitance sensitivity and rate of capacitance sensitivity change for the convex cross-section beam—the ultimate in-plane displacement of driving mode is fixed and the driving amplitude is maximal. This figure shows the maximum value of the capacitance sensitivity when the gyroscope has different spindle azimuth angles. The right vertical axis is the rate of capacitance sensitivity change.