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. 2018 Apr 24;9(5):198. doi: 10.3390/mi9050198

Figure 14.

Figure 14

Influence of the DRIE verticality error on the spindle azimuth angle of the polygonal cross-section beam and convex cross-section beam; (a) shows the relationship between spindle azimuth angle variation and DRIE verticality error; (b) shows the range of variation—the value is the difference between the maximum and minimum values of each line.