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. 2018 Apr 24;9(5):198. doi: 10.3390/mi9050198

Figure 15.

Figure 15

The sensitive structure of the BFVG: he four points with maximum amplitude are defined as A, B, C, D, and a fabrication defect is set near the anchor on the right side; the size of the fabrication defect is 50 μm × 10 μm × 100 μm.