Table 1.

Structural parameters of a typical system (unit: μm).

Gyro Width	Gyro Height	Mass Width	Mass Height	Oblique Beam Width	Support Beam Width	Support Beam Height
$w_0$	$l_0$	$w_1$	$l_2$	$w_2$	$w_3$	$l_1$
6000	6000	1400	1600	60	70	220