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The range of spindle azimuth angles under different fabrication imperfections (unit: %).
| Error Types | Polygonal Cross-Section Beam
|
Convex Cross-Section Beam
|
|---|---|---|
| Alignment error | 6.24089 | 12.5886 |
| Silicon thickness error | 2.48747 | 4.19936 |
| Etching depth error | 0.77974 | 0.75824 |
| Upper width error | 0.57613 | 5.50023 |
| Bottom width error | 3.11562 | 7.33358 |
| DRIE verticality error | 0.99716 | 1.88352 |
