Table 1.

Comparison of the structures of the previous sensor and newly fabricated sensor.

Work	Cantilever Size	Strain Gauge Resistance	Tip Height of Cantilever	Interdigitated Array Electrode	SEM Image
Previous work	Width: 200 µm, Length: 290 µm	7 kΩ	20–30 µm (±5.0 µm)	N/A
This work	Width: 70 µm, Length: 155 µm	2 kΩ	9.60 µm (±0.7 µm)