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(a) Fabrication process used for heater and resistance temperature detector (RTD), shown for heater. Material is put on the thermal release tape (TRT) and cut with Silhouette cutter. TRT is heated, excess material is removed and remaining material is transferred to Tegaderm; (b) Complete device on tegaderm. Aluminum with blue polyimide backing forms the resistive heating element while Au/Cr 100/10 nm forms the resistance temperature detector.
