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(a) 13.5-µm deep and 14-µm wide groove (channel) generated by the picosecond laser using a 21-µm-diameter spot; (b) Depth and (c) width (measured at full width at half maximum (FWHM)) of the channels generated with a pulse repetition frequency (PRF) of 20 kHz and a laser beam scan velocity (v) of 40 mm/s. Channels were measured using a three-dimensional (3D) surface profilometer (Alicona InfiniteFocus®).
