Table 1.
Comparison of MEMS Rotational Electrostatic Actuators.
| Reference | Rotation Angle (°) | Actuation Voltage (V) | Area (mm2) | Resonance Frequency (Hz) | Notes |
|---|---|---|---|---|---|
| [19] | ±9 | 60 | 1 × 1 | 410 | Serpentine flexures used to increase the rotation angle at the expense of reduced operating speed. |
| [23] | 4.7 | 75 | 1.5 × 0.6 | N/A | A real pivot formed by a double-clamped beam was utilized for the rotational tuning structures in MEMS tunable lasers. |
| [24] | 2.8 | 100 | ~2 × 0.5 | N/A | A movable arm 2 mm long forms the main rotating structure and can be reliably operated in the kilohertz range. |
| [25] | ±1.5 | 190 | ~2 × 1 | ~1 k | Actuators with movable arms of 1.2–1.5 mm with virtual pivotal point of rotation for external cavity tunable lasers. |
| [26] | 3 | 130 | 2 × 1 | 246 | Long-arm (>5 mm) comb-drive rotary actuator with an externally mounted large mirror for optical applications. |
| [27] | ~±0.8 | 50 | ~0.6 × 0.6 | ~8–11.1 k | MEMS switch based on a rotary electrostatic comb actuator. |
| [28] | 2 | 100 | ~2.5 × 2 | 10.268 k | Microgripper based on a rotary comb actuator. |
| This work | ±9.5 | 180 | 1.3 × 1 | 2.68 k | Circular comb actuator with latch lock and gap-closing mechanisms for reconfigurable and low-loss in-plane integrated optics. |