Table 1.

Parameters for design of the V-shaped beam.

Parameter	Meaning
F	Input force
f	Reaction force of the spheroid
L	Length of V-shaped beam
$\mathsf{\theta }$	Elevation angle of V-shaped beam
E	Young’s modulus of Si
$I_p$	Second moment of area of V-shaped beam
$w^{\prime }$	Equivalent parallel probe width of V-shaped beam
$w_p$	Probe width of V-shaped beam