Table 1.

The calibration sample data of the SiNW pressure sensor for the training of the PSO–BP compensation algorithm, which are obtained with pressures from 0 to 100 kPa and with temperatures from −20 to 50 °C.

	Pressure	P = 0 kPa	P = 10 kPa	P = 20 kPa	P = 30 kPa	P = 40 kPa	P = 50 kPa	P = 60 kPa	P = 70 kPa	P = 80 kPa	P = 90 kPa	P = 100 kPa
Temperature
T = −20 °C		Up = 2.20 mV	Up = 7.68 mV	Up = 15.12 mV	Up = 20.00 mV	Up = 28.88 mV	Up = 35.44 mV	Up = 42.11 mV	Up = 48.88 mV	Up = 56.00 mV	Up = 63.13 mV	Up = 68.96 mV
T = −10 °C		Up = 4.40 mV	Up = 8.44 mV	Up = 14.96 mV	Up = 21.81 mV	Up = 28.12 mV	Up = 34.72 mV	Up = 41.00 mV	Up = 48.08 mV	Up = 54.89 mV	Up = 61.88 mV	Up = 66.71 mV
T = 0 °C		Up = 3.64 mV	Up = 7.73 mV	Up = 14.16 mV	Up = 20.71 mV	Up = 26.89 mV	Up = 33.35 mV	Up = 39.80 mV	Up = 46.20 mV	Up = 53.20 mV	Up = 60.22 mV	Up = 66.96 mV
T = 10 °C		Up = 2.29 mV	Up = 6.84 mV	Up = 13.85 mV	Up = 20.19 mV	Up = 26.16 mV	Up = 32.80 mV	Up = 38.96 mV	Up = 45.39 mV	Up = 52.21 mV	Up = 58.95 mV	Up = 65.81 mV
T = 20 °C		Up = 2.04 mV	Up = 6.56 mV	Up = 13.36 mV	Up = 19.84 mV	Up = 24.56 mV	Up = 32.33 mV	Up = 38.84 mV	Up = 45.12 mV	Up = 51.82 mV	Up = 58.60 mV	Up = 65.36 mV
T = 30 °C		Up = 1.28 mV	Up = 5.11 mV	Up = 11.11 mV	Up = 17.60 mV	Up = 23.80 mV	Up = 29.84 mV	Up = 36.40 mV	Up = 43.11 mV	Up = 49.84 mV	Up = 56.68 mV	Up = 63.80 mV
T = 40 °C		Up = 0.97 mV	Up = 3.20 mV	Up = 8.40 mV	Up = 14.84 mV	Up = 22.47 mV	Up = 28.36 mV	Up = 35.20 mV	Up = 40.38 mV	Up = 47.29 mV	Up = 53.48 mV	Up = 59.29 mV
T = 50 °C		Up = 0.44 mV	Up = 3.08 mV	Up = 8.00 mV	Up = 14.49 mV	Up = 21.00 mV	Up = 28.12 mV	Up = 33.75 mV	Up = 40.04 mV	Up = 47.09 mV	Up = 53.15 mV	Up = 59.00 mV