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. 2017 Jul 6;8(7):215. doi: 10.3390/mi8070215
ϑa: Torsional angle of actuators; ϑm: Torsional angle of mirror plate;
m1: Mass of actuators; m2: Mass of connecting bars;
k1: Stiffness of actuators; k2: Stiffness of connecting bars;
km: Stiffness of mirror; lc: Length of connecting bars;
Ieffm : Effective moment of inertia of mirror; MPZT: Torque delivered by PZT;
K: Geometric matching factor.