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Fabrication of the microfluidic device. (a) Wafer cleaning with acetone and ethanol in an ultrasonic bath; (b) SU-8 patterning for the mold of the microchannels; (c) SU-8 patterning for the mold of the microchamber; (d) Polydimethylsiloxane (PDMS) curing; (e) Peeling off the PDMS replica from the mold; (f) Bonding the PDMS replica and a glass substrate.
