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. 2017 Jul 2;8(7):210. doi: 10.3390/mi8070210

Figure 3.

Figure 3

High speed MEMS scanner for a 140-kHz wavelength tunable-laser in Sweep Source (SS)-OCT: (a) SEM images; and side-bank vertical combdrives in detail (b,c). (d) System configuration of external cavity tunable laser with the MEMS scanner which replaces the conventional bulky polygon scanner (Reproduced with permission from IEEE [37]).