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Two-dimensional MEMS scanner based OCT system. (a) Scanning electron micrograph (SEM) of the MEMS two-axis optical scanner, the scanner has a larger than 1 mm diameter mirror and uses angled vertical comb (AVC) actuators to produce a large angle scan for high resolution imaging. (b) Mechanical drawing of the packaging. SMF, single mode fiber; FC, fiber collimator; AL, aluminum (Reproduced with permission from OSA [47]).
