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Vertical-rotational MEMS scanner for dual-axis confocal endomicroscope with XZ cross-sectional imaging: (a) schematic of the outer diameter 5.5 mm packaging; and (b) vertical-rotational micro-scanner based on active outer vertical displacement and passive inner resonant scanning. Inset: SEM, variant with a solid dog-bone shaped mirror surface for dual-axis confocal endomicroscope (Reproduced with permission from IEEE [85]).
