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AlN-based piezoelectric micromachined ultrasonic transducer (PMUT) for photoacoustic imaging: (a) schematic drawing of the PMUT based photoacoustic imaging system; (b) schematic drawing of the thin film AlN based PMUT device; and (c) SEM image of the AlN thin film on bottom electrode, scale bar 1 µm (Reproduced with permission from AIP [121]).
