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The tested exposure depth data under different exposure doses.
| Exposure Dose (mJ/cm2) | Exposure Depth (μm) | Standard Deviation (μm) | Exposure Dose (mJ/cm2) | Exposure Depth (μm) | Standard Deviation (μm) |
|---|---|---|---|---|---|
| 18.9 | 1.05 | 0.025 | 151.2 | 8 | 0.25 |
| 37.8 | 2.25 | 0.2 | 170.1 | 8.6 | 0.23 |
| 56.7 | 3.85 | 0.1 | 189 | 9.12 | 0.19 |
| 75.6 | 5 | 0.15 | 207.9 | 9.6 | 0.18 |
| 94.5 | 5.9 | 0.15 | 226.8 | 10 | 0.15 |
| 113.4 | 6.7 | 0.2 | 245.7 | 10.26 | 0.18 |
| 132.3 | 7.45 | 0.25 | 264.6 | 10.53 | 0.19 |
