Table 3.

The exposure depth measurement result under a 20 s exposure time.

Grayscale	Exposure Depth (μm)	Grayscale	Exposure Depth (μm)
30	0	100	2.86
40	0.14	110	4.06
50	0.25	120	4.98
60	0.52	130	6.1
70	0.91	140	7.12
80	1.36	150	8.08
90	2.1	-	-