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. 2016 Sep 8;7(9):160. doi: 10.3390/mi7090160

Figure 15.

Figure 15

The schematic representation of a two-port capacitive beam resonator (a) and the scanning electron micrograph of a capacitive polysilicon disk resonator (b) [62]. © 2005 IEEE. Reprinted with permission from High-Q UHF micromechanical radial-contour mode disk resonators by J. R. Clark in J. Microelectromech. Syst., 2005.