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Scanning electron micrograph (SEM) of an AlN-on-Silicon fifth-order lateral-extensional mode (a) and an AlN contour-mode rectangular resonator (b) [135]. © 2007 IEEE. Reprinted with permission from Enhanced Power Handling and Quality Factor in Thin-Film Piezoelectric-on-Substrate Resonators by R. Abdolvand in Proceedings of the IEEE Ultrasonics Symposium, 2007.
