Figure 21.
(a) A MEMS oscillator and (b) its compensation and frequency synthesis electronics [202]. © 2015 IEEE. Reprinted with permission from A 3 ppm 1.5 × 0.8 mm2 1.0 μA 32.768 kHz MEMS-Based Oscillator by Zaliasl in J. Solid-State Circuits, 2015.