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. 2016 Sep 8;7(9):160. doi: 10.3390/mi7090160

Figure 33.

Figure 33

A resonant mass sensor based on coupled resonators. Note the addition of platinum sheets used for characterization of the sensor [269]. © 2016 IEEE. Reprinted with permission from Improving sensitivity of resonant sensor systems through strong mechanical coupling by M.S. Hajhashemi in J. Microelectromech. Syst., 2016.