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. 2016 May 4;7(5):82. doi: 10.3390/mi7050082

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© 2016 by the authors.

Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC-BY) license (http://creativecommons.org/licenses/by/4.0/).

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Schematic cross-sectional illustrations of the 3D fabrication process by conventional photolithography with NOA 81. (a) Fabricated PDMS molds by soft lithography. The numbers indicate layer order and #0 is a mold for a lid. (b) Injection of uncured NOA 81 to the spaces between PDMS molds by capillary force. (c) UV irradiation for partially curing NOA 81. (d) Lamination of NOA 81 sheets. NOA sheets are aligned after one side of PDMS molds are peeled off. The sheets are bonded by UV irradiation. The alignment and UV bonding processes are repeated.