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. 2016 Feb 6;7(2):24. doi: 10.3390/mi7020024

Figure 3.

Figure 3

Several designs of scanning micromirrors with piezoelectric actuators: (a) a piezoelectric actuator in cantilever configuration by Koh et al. [89], and (b) a piezoelectric actuator in parallel kinematics [76]. Reproduced with permission from [76,89].