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. 2016 Feb 6;7(2):24. doi: 10.3390/mi7020024

Figure 4.

Figure 4

Designs of MEMS scanning micromirror with electrothermal actuators with four sets of actuators: (A) integrated endoscopic probe by Mu et al. [115], (B) by Lzhar et al. [122], (C) by Singh et al. [110], and (D) by Xie et al. [121,124]. Reproduced with permission from [110,115,121,122,124].