Table 1.
Relevant work on micromirrors with electrostatic actuators.
| Reference | Year | Size (in mm) | Characteristics | Operating Conditions | Natural Frequency |
|---|---|---|---|---|---|
| Linear Comb Actuators | |||||
| Milanovic et al. [15] | 2001 | 0.7 mirror | ±20.8° optical (2 axis) | 90 V | 2 kHz |
| Sun et al. [11] | 2002 | 3.2 × 3.0 | 4.5 μm, 1.5 μm | 10 , 68 | - |
| Li et al. [20] | 2003 | - | 45 μm | 35 V | - |
| Tung et al. [16] | 2005 | 2.5 × 2.5 | ±0.6°, 5 μm | 40 V | 5 kHz |
| Liu et al. [14] | 2007 | 4 × 4 | 12.5, 12.5, 3.5 μm | 30 V | - |
| Mukhopadhyay et al. [9] | 2008 | - | 1.72°, 18 μm, 18 μm | 85 V | 465 Hz |
| Kim et al. [19] | 2008 | - | 57 μm | 9 V | - |
| Laszczyk et al. [8] | 2010 | 10 × 10 | 30 μm | 100 V | 290 and 550 Hz |
| Brouwer et al. [13] | 2010 | 4.9 × 5.2 mm | 20, 20, 20 μm | 105 V | 3800 Hz |
| He et al. [58] | 2011 | 3.2 × 3.2 | ±1.5°, 86 μm | 200 V | 1 kHz |
| Chu et al. [37] | 2011 | 8 × 8 | 14°, 11.5° | 12 V | 247 Hz |
| Vertical Comb Actuators | |||||
| Conant et al. [27] | 2000 | 0.55 dia mirror | 24.9° | 250 V | 34 kHz |
| Patterson et al. [29] | 2002 | 1 × 1 mirror | 18° | 110 V | 1400 Hz |
| Xie et al. [38] | 2002 | 0.6 × 0.6 | 270 μm | 14 V | 5.08 kHz |
| Lee et al. [32] | 2002 | 1.5 × 1.2 mirror | 12° | 28 , 35 | 1353 Hz |
| Xie et al. [45] | 2003 | 1 × 1 mirror | 4.7° | 25 V | 233 Hz |
| Milanovic et al. [42] | 2004 | 0.4 × 0.4 | 10°, 10°, 30 μm | 150 V | 1890 Hz |
| Lee [36] | 2004 | 1.5 × 1.5 | ±15.2° mech | 40 V | 1340 Hz |
| Jeong et al. [44] | 2005 | 0.3 dia | 6.5°, 3 μm | 5.5 V | 830 Hz |
| Jung et al. [21] | 2005 | 2.5 × 3 die | 30° both axis | 100 V | 8 kHz |
| Piyawattanametha et al. [34] | 2005 | - | 12.4° and 8.2° | 55 V | 144 Hz |
| Chong et al. [28] | 2006 | - | 8° | 5 V | 350 Hz |
| Jung et al. [22] | 2006 | 1.2 mm mirror | 20° optical | 100 V | 2.4 kHz |
| Wu et al. [31] | 2006 | 0.8 × 0.8 mirror | 1.5° (2-axis) | 35 V | 3.8 kHz |
| Wu et al. [31] | 2006 | - | 16.3, 16.3, 4.1 μm | 30 V | 1900 Hz |
| Zhou et al. [33] | 2006 | 0.8 × 0.8 mirror | 21.8° one axis | 75 V | 3.6 kHz |
| Aguirre et al. [24] | 2007 | 3 × 3 | ±6° mech. (2-axis) | 160 V | 140 and 463 Hz |
| Pardo et al. [43] | 2007 | 0.12 × 0.12 mirror | 8°, 5 μm | 110 V | - |
| Wu et al. [26] | 2007 | 0.2 × 0.15 | 46° | 140 V | - |
| Hsu et al. [30] | 2008 | 1 mm dia | 10° optical | 100 V | 30 kHz |
| Kumar et al. [25] | 2008 | 2 × 2.5 die | ±9° (2 axis) | 110 V | 385 Hz |
| Sandner et al. [40] | 2009 | 3 dia mirror | 100 μm | 44 V | 500 Hz |
| 1.1 × 1.5 | 250 μm | 30 V | 5000 Hz | ||
| Rotary Comb Actuators | |||||
| Ayers et al. [52] | 2004 | <1 mm diameter | - | - | - |
| Grade et al. [46] | 2004 | 4.3 × 3 chip | 5°, 300 μm | 150 V | 300 Hz |
| Yeh et al. [48] | 2006 | 3.2 × 4.7 chip | 2.6° | 5 V | 400 Hz |
| Zhang et al. [47] | 2007 | 1.5 mm long | 4.7° | 70 V | - |
| Surface Electrostatic Actuators | |||||
| Su et al. [70] | 2001 | 0.48 × 0.46 mirror | 7.5° | - | - |
| Zara et al. [73,74,75] | 2002 | IFA method | 77° and 142° | 65 V | - |
| 2002 | (1.5 mirror) | 50° optical, 146° | 50 V | 20.6 Hz | |
| 2003 | 2 × 2.25 mm | - | - | - | |
| Niklaus et al. [68] | 2003 | 16 μm × 16 μm | 0.8 μm gap (one axis) | 12.5 V | - |
| Greywall et al. [63] | 2003 | - | 8° | 142 V | - |
| Greywall et al. [63] | 2003 | - | 9° | 210 V | - |
| Dokmeci et al. [71] | 2004 | 0.75 × 0.8 mirror | 5° | 60 V | 175 Hz |
| Pan [55] | 2004 | - | 50 μm | 100 V | - |
| Yeow et al. [53] | 2005 | 1.4 × 1.7 | - | 100V | 45 and 181 Hz |
| Kudrle et al. [61] | 2005 | 70 × 70 for 1296 mirrors | 5° mech. | 160 V | 78 and 187 Hz |
| Yan et al. [60] | 2005 | 0.2 × 0.2 mirror | 0.5° | 2.7 V | 50 Hz |
| Cheng et al. [66] | 2005 | - | 5 μm | 22.5 V | - |
| Kallweit et al. [64] | 2006 | 0.5 × 0.5 | 2.5° (one axis) | 300 V | - |
| Singh et al. [65] | 2006 | 10 × 10 | 2° | 50 V | - |
| Joudrey et al. [67] | 2006 | 8 × 3 | 2° | 200 V | 1000 Hz |
| Ya’akobovitz et al. [62] | 2008 | 2 × 2 plate | 10° (one axis) | 20 V | 3.8 kHz |
| Kao et al. [54] | 2009 | 50 μm mirror | 2.25° both axis | 40 V | 59.1 kHz |
| (Displacement up 2.10 μm) | |||||
| Hu et al. [57,59] | 2010 | 0.4 × 0.4 mirror | 1.8°, 1.65 μm | 100 V | 2.5 kHz |
| Zhang et al. [12] | 2010 | - | 5° | 30 V | - |
| Bai et al. [72] | 2010 | 1 × 1 mirror | 11° | 55 V, 240 V | - |
| Michael et al. [56] | 2012 | 0.2 × 0.8 mirror | 27 μm | 17 V | - |