Figure 8.
SEM image of the SiC cantilever [45]. Reprinted from Microelecton. Eng., 78–79, Jiang et al., Dry release fabrication and testing of SiC electrostatic cantilever actuators, 78–79, © 2005, with permission from Elsevier.
Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.