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Measured resonant peaks for a 200-m SiC cantilever with (a) f = 66.65 kHz (V = 0.2 V) and (b) f = 33.325 kHz (V = 0 V) [45]. Reprinted from Microelecton. Eng., 78–79, Jiang et al., Dry release fabrication and testing of SiC electrostatic cantilever actuators, 78–79, © 2005, with permission from Elsevier.
