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Measured vibration amplitude at resonance as a function of (a) DC voltage (V = 0.3 V) and (b) AC voltage (V = 0.2 V) for 200 m SiC cantilever [45]. Reprinted from Microelecton. Eng., 78–79, Jiang et al., Dry release fabrication and testing of SiC electrostatic cantilever actuators, 78–79, © 2005, with permission from Elsevier.
