Figure 11.

SEM images of 3C-SiC cantilevers with NiCr electrodes for (a) open-termination and (b) closed termination design [26]. Reprinted from Sens. Act. A: Phys., 128, Jiang et al., SiC cantilever resonators with electrothermal actuation, 376–386, ^© 2006, with permission from Elsevier.