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Optically-measured vibration amplitude at resonance as a function of electrode length, L, for an electrothermally-actuated SiC bridge (DC bias voltage 1 V) with length, L (inset: SEM images of fabricated devices with slab and u-shaped electrodes) [52]. Reprinted from Microelectron. Eng., 87, Mastropaolo et al., Electro-thermal behaviour of Al/SiC clamped-clamped beams, 573–575, © 2010, with permission from Elsevier.
