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. 2016 Nov 15;7(11):208. doi: 10.3390/mi7110208

Figure 14.

Figure 14

SEM image of a SiC cantilever resonator with a PZT actuating electrode [48]. Reprinted with permission from J. Vac. Sci. Technol. B, 28, Mastropaolo et al., Piezoelectrically driven silicon carbide resonators, © 2009, American Vacuum Society.