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Electrothermally-actuated and piezoelectrically-sensed 3C-SiC cantilever resonator, (a) SEM image (b) piezoelectrically-measured frequency response, both magnitude and phase (electrothermal actuation with input AC signal power of 10 dBm and DC bias voltage of 9 V) [60]. Reprinted from Microelectron. Eng., 145, Sviličić et al., Tunable MEMS cantilever resonators electrothermally actuated and piezoelectrically sensed, 38–42, © 2015, with permission from Elsevier.
