Figure 17.

SEM (a,b) and optical (c) images of 3C-SiC structures with ports for piezoelectric actuation and read out: cantilever [65], bridge [66] and ring [67]. Reprinted with permission from J. Vac. Sci. Technol. B, 30, Sviličić et al., Piezoelectrically transduced silicon carbide MEMS double-clamped beam resonators, ^© 2012, American Vacuum Society, and reprinted from Microelectron. Eng., 97, Mastropaolo et al., Piezo-electrically actuated and sensed silicon carbide ring resonators, 220–222, ^© 2012, with permission from Elsevier.