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. 2016 Nov 15;7(11):208. doi: 10.3390/mi7110208

Figure 19.

Figure 19

Measured resonant frequency shift of ring resonators in response to the change in DC voltage applied to Pt electrodes [64]. Reprinted from Sens. Act. A: Phys., 226, Sviličić et al., Widely tunable MEMS ring resonator with electrothermal actuation and piezoelectric sensing for filtering applications, 149–153, © 2015, with permission from Elsevier.