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Measured resonant frequency shift of bridge resonators in response to the change in DC voltage applied to a PZT electrode with a length of 33 or 50 m [66]. Reprinted with permission from J. Vac. Sci. Technol. B, 30, Sviličić et al., Piezoelectrically transduced silicon carbide MEMS double-clamped beam resonators, © 2012, American Vacuum Society.
