Table 5.
Positive Master | PDMS | PDMS after Bonding |
---|---|---|
Width (µm) | ||
105.6 ± 5.2 | 107.3 ± 7.6 | 95.5 ± 8.5 |
Depth (µm) | ||
- | 55.2 ± 3.8 | 60.3 ± 5.8 |
Positive Master | PDMS | PDMS after Bonding |
---|---|---|
Width (µm) | ||
105.6 ± 5.2 | 107.3 ± 7.6 | 95.5 ± 8.5 |
Depth (µm) | ||
- | 55.2 ± 3.8 | 60.3 ± 5.8 |