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(a) Schematic of a tunable air-slot 2D PhC cavity with integrated electrostatic actuators. The yellow holes denote the defect region of the 2D PhC slab. (b) Schematic of a tunable transversely split nanobeam cavity. (c) SEM image of a tunable longitudinally split nanobeam cavity with close-up views given in (d) and (e). (f) Schematic of a longitudinally split nanobeam cavity with different tuning directions given in (g) and (h).
