Table 2.

Comparison of light modulation performances with MEMS/NEMS tunable Si photonic devices, plasmonic devices, mechanically tunable metamaterials, and chip-scale optomechanic devices.

	Metrics	Tuning Range	Modulation Depth	Operation Speed	Reference
Configurations & Actuation Methods
MEMS/NEMS tunable Si photonic devices	Electrostatic	Moderate	High	Fast	Refer to Table 1
MEMS/NEMS tunable plasmonic devices, for guided mode	Electrostatic	Moderate	High	Fast	[115]
Mechanically tunable metamaterials, for free-space light	Thermal	Moderate	High	Slow	[140,141,142,143]
	Electrostatic	Wide	High	Moderate	[144,145,146,147,148,149,150,151,152,153,154,155,156,157,158,159,160,161]
	Magnetoelastic	Moderate	Low	Slow	[162,163]
Chip-scale optomechanics	Driving with optical force	Small	Low	Ultra-fast	[133,134,135]