Table 3.

Comparison of actuator technology and co-integration from literature (materials of the actuator, principle of operation of the actuator, co-integration type).

Materials	Principle	Co-integration	References
Au	gap-closing	monolithic	[50]
fluid	thermal	hybrid	[63,64]
	electrostatic	hybrid	[65]
GaAs/AlGaAs	comb-drive	monolithic	[34]
glass	(sensing)	hybrid	[7,82]
InGaAsP	gap-closing	monolithic	[35,36,39]
	light	monolithic	[40]
	(sensing)	monolithic	[41]
InP	gap-closing	monolithic	[37]
metal	gap-closing	hybrid	[5,54]
		stacked	[72,74,75]
Ni/Fe	magnetic	hybrid	[55,56]
polymer/metal	gap-closing	monolithic	[8]
poly-Si	gap-closing	hybrid	[28]
Si	gap-closing	hybrid	[67,68,69,73,89]
		monolithic	[20,21]
	(sensing)	monolithic	[30]
		stacked	[4,52,53,70,71,77,78,79]
SiON	gap-closing	hybrid	[66,83]
		monolithic	[57,58,61,62]
	(sensing)	hybrid	[84]
		monolithic	[6,51,59,60,81]
SOI	comb-drive	hybrid	[49]
		monolithic	[19,22,24,25,26,27,31,32,48]
		stacked	[76]
	gap-closing	monolithic	[16,17,23,29,43]
	(sensing)	monolithic	[33]