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. 2017 Oct 14;8(10):308. doi: 10.3390/mi8100308

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© 2017 by the authors.

Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).

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Optical microscopy image of the intersections of channels obtained using several sets of compensation structures, depth etch = 77 μm (a) case of set Q1; (b) case of set Q2; (c) case of set Q3; (d) case of set I1.