Table 2.
Values (in μm) of geometrical parameters for the compensation structures.
| Set | α | β | γ | δ |
|---|---|---|---|---|
| Q1 | 100 | 170 | 50 | 0 |
| Q2 | 100 | 170 | 50 | 50 |
| Q3 | 100 | 210 | 25 | 50 |
| I1 | 50 | 200 | 75 | - |
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