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. 2018 Oct 22;8:15595. doi: 10.1038/s41598-018-33885-y

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© The Author(s) 2018

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Inverted and upright TiN micropyramids. (a) A schematic of the cross section of the inverted pyramid design. (b) The inverted pyramid substrate next to a ruler. (c) Top-down view of the inverted pyramids with SEM. (d) Tilted SEM of the inverted pyramids, showing consistent fabrication dimensions for each structure. (e) A schematic of the cross section of the upright pyramid design. (f) The upright pyramid substrate next to a ruler. (g) Top-down view of the upright pyramid design taken via SEM. (h) Tilted view of the inverted pyramid design taken via SEM. This shows a consistent rising of the film in between each pyramid.