Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.
Wafers are initially deposited with low-stress silicon nitride (100 nm-thick) followed by photolithography, and plasma etching. In practice we fabricated eight substrates on one 100-mm diameter wafer. See Supplemental Information for fabrication plan details.
