Fig. 16.
Optical images of a a U-shaped polysilicon piezoresistor-based SU-8 cantilever sensor, b two U-shaped cantilever sensors, c gold pads and track lines, and d complete die.
Adopted from Ref. [230]. Copyright (2009) IEEE
Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.