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. 2018 Feb 2;10(2):35. doi: 10.1007/s40820-018-0189-1

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© The Author(s) 2018

Open AccessThis article is distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.

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Fig. 3 — Piezoresistive SU-8 cantilever sensors: a an image of processed silicon wafer with a zoom-in view of the sensor device arrays attached to the wafer before release. b An image of one of the device chips in the array with four rectangular cantilevers. c Array of sensor device chips after the release, and d one of the device chips.

Adopted from Ref. [67]. Copyright (2011) IOP Publishing