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Various combinations of materials for piezoresistor and structural layer with their respective G/E ratios [90, 192–195]
| Structural layer | Young’s modulus (E) (GPa) | Piezoresistor | Gauge factor (G) | G/E |
|---|---|---|---|---|
| Si | 169 | Si | 140 | 0.82 |
| SiO2 | 70 | Si | 140 | 2.0 |
| 70 | p-poly-Si | 20 | 0.28 | |
| Si3N4 | 250 | Au | 2 | 8 × 10−3 |
| 250 | p-poly-Si | 20 | 8 × 10−2 | |
| SU-8 | 5 | Au | 2 | 0.40 |
| 5 | p-poly-Si | 20 | 4.0 | |
| 5 | CB SU-8 | 20 | 4.0 | |
| 5 | Graphene nano-platelet–SU-8 | 144 | 28.8 |
