Table 9.
Typical chemical and biological sensing applications of piezoresistive SU-8 polymeric cantilever sensors
| References | Authors | Application |
|---|---|---|
| [87] | Thaysen et al. | Biochemical sensing |
| [230] | Kale et al. | Antigen–antibody (myoglobin) |
| [192] | Seena et al. | Explosive detection |
| [233] | Patil et al. | Explosive detection (TNT, RDX, and PETN) |
| [232] | Reddy et al. | Carbon monoxide (CO) |
| [67] | Seena et al. | Explosive detection (TNT) |
| [229] | Johansson et al. | DNA hybridization |
| [227] | Patil et al. | Humidity and moisture detection |
| [68] | Johansson et al. | Mercaptohexanol |
| [226] | Johansson et al. | Mercaptohexanol |