Table 2.

Uncertainty Values and Corresponding Rationales.

Uncertainty	Value	Rationale
${\mathsf{\omega }}_{\mathrm{L}}$	± 2 µm	photolithographical alignment accuracy
${\mathsf{\omega }}_{\mathrm{W}}$	± 2 µm
${\mathsf{\omega }}_{\mathrm{T}}$	± 4 nm	metal deposition empirical data